JPH0364828B2 - - Google Patents

Info

Publication number
JPH0364828B2
JPH0364828B2 JP21966685A JP21966685A JPH0364828B2 JP H0364828 B2 JPH0364828 B2 JP H0364828B2 JP 21966685 A JP21966685 A JP 21966685A JP 21966685 A JP21966685 A JP 21966685A JP H0364828 B2 JPH0364828 B2 JP H0364828B2
Authority
JP
Japan
Prior art keywords
sample
light
stray light
slit
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP21966685A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6279336A (ja
Inventor
Kei Nara
Tadashi Hasegawa
Mizoo Horai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP21966685A priority Critical patent/JPS6279336A/ja
Publication of JPS6279336A publication Critical patent/JPS6279336A/ja
Publication of JPH0364828B2 publication Critical patent/JPH0364828B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP21966685A 1985-10-02 1985-10-02 迷光除去装置 Granted JPS6279336A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21966685A JPS6279336A (ja) 1985-10-02 1985-10-02 迷光除去装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21966685A JPS6279336A (ja) 1985-10-02 1985-10-02 迷光除去装置

Publications (2)

Publication Number Publication Date
JPS6279336A JPS6279336A (ja) 1987-04-11
JPH0364828B2 true JPH0364828B2 (en]) 1991-10-08

Family

ID=16739074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21966685A Granted JPS6279336A (ja) 1985-10-02 1985-10-02 迷光除去装置

Country Status (1)

Country Link
JP (1) JPS6279336A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02182376A (ja) * 1989-01-10 1990-07-17 Fanuc Ltd アークセンサーの対物透光窓保護構造
JP2021012147A (ja) * 2019-07-09 2021-02-04 富士ゼロックス株式会社 計測装置

Also Published As

Publication number Publication date
JPS6279336A (ja) 1987-04-11

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